期刊文献+
任意字段
题名或关键词
题名
关键词
文摘
作者
第一作者
机构
刊名
分类号
参考文献
作者简介
基金资助
栏目信息

Al和Mn掺杂ZnO薄膜的结构和电学性质

Microstructure and electric properties of Al,Mn-doped ZnO thin films
下载PDF
导出
摘要 采用磁控溅射方法在硅衬底上制备了纯ZnO薄膜和Al、Mn掺杂的ZnO薄膜。用X衍射和原子力显微镜分析了薄膜的晶化行为和显微结构,利用Keithley 2400高阻计分析了薄膜的电学性质。结果表明,掺入Al的ZnO薄膜有良好的晶化,有很好的表面结构,显示强烈的(002)择优取向,呈现低的电阻率,可用作太阳能电池的电极材料。 The pure and Al,Mn-doped ZnO thin films were prepared on p-Si（100）substrates by r.f.magnetron sputtering at room temperature.The effect of Al and Mn doping on structural and electrical properties of ZnO films are discussed on this work.
作者 黄卫华 贾历程
机构地区 广西机电职业技术学院 广西大学实验设备处
出处 《实验技术与管理》 CAS 北大核心 2016年第6期42-45,共4页 Experimental Technology and Management
基金 广西壮族自治区教育厅立项项目"太阳能电池透明导电电极材料的研究"(LX2014560)
关键词 ZNO薄膜 薄膜结构 电学特性 ZnO thin film thin film microstructure electric property
分类号 TB383 [一般工业技术—材料科学与工程]
  • 相关文献

参考文献13

  • 1Zhang Yidong,Jia Huimin,Li Pinjiang,et al.Influence of glucose on the structural and optical properties of ZnO thin films prepared by sol-gel method[J].Optics Communications,2011,284(1):236-239.
  • 2Yu Y S,Kim G Y,Min B H,et al.Optical characteristics of Ge doped ZnO compound[J].Journal of the European Ceramics Society,2004,24(6):1865-1868.
  • 3Takao M,Yoshida H,Yanashima K,et al.GaN-based high-power laser diodes[J].Materials Science and Engineering B,2001,82(1/2/3):248-252.
  • 4Park T E,Kong B H,Cho H K,et al.Influence of gas atmosphere during growth interruption in the deposition of ZnO films by magnetron sputtering[J].Physica B,2006,376/377:735-740.
  • 5Nagata T,Shimura T,Ashida A,et al.Electro-optic property of ZnO:X(X=Li,Mg)thin films[J].J Cryst Growth,2002,237(1):533-537.
  • 6Bhattacharya P,Das R R,Katiyar R S.Comparative study of Mg doped ZnO and multilayer ZnO/MgO thin films[J].Thin Solid Films,2004,447:564-567.
  • 7Jiang Meifu,Wang Zhenning,Ning Zhaoyuan.Study of structural and optical properties of Ge doped ZnO films[J].Thin Solid Films,2009,517(24):6717-6720.
  • 8Lisa J Wang,Gregory J Exarhos.Persistent conductivity in postgrowth doped ZnO films following pulsed UV laser irradiation[J].Thin Solid Films,2010,519(5):1495-1500.
  • 9Zhang Canyun.High-quality oriented ZnO films grown by sol-gel process assisted with ZnO seed layer[J].Journal of Physics and Chemistry of Solids,2010,71(3):364-369.
  • 10Wei X Q,Zhang Z,Yu Y X,et al.Comparative study on structural and optical properties of ZnO thin films prepared by PLD using ZnO powder target and ceramic target[J].Optics&Laser Technology,2009,41(5):530-534.

二级参考文献3

  • 1N. W. Emanetoglu, C. Coda, Y. Liu, S. Liang, Y. Lu. Epitaxial ZnO piezoelectric thin films for saw fllters[J].Materiais Science in Semiconductor Processing,1999, 2(3):247-252.
  • 2Guanghui Ning, Xiaopeng Zhao, Jia Li. Structure and optical properties of MgxZn1-xO nanoparticles prepared by sol - gel method[J]. Optical Ma tefials,2004,27( 1 ): 1-5.
  • 3F. K. Shah, Y. S. Yu. Optical properties of pure and AI doped ZnO thin fdms fabricated with plasma produced by exeimer laser [J].Thin Solid Films,2003,435( 1 ): 174-178.

共引文献2

实验技术与管理
2016年 第6期

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部