磷烷中砷烷的选择性分解催化性能研究

Catalysts Research for the Selective Decomposition of Arsine in Phosphine

研发制备NATA-PH-1型催化剂,能够高效的将磷烷中约100×10^(-6)砷烷去除到仪器检测限30×10^(-9)以下,完全能够达到半导体制程关于高纯磷烷中砷烷低于100×10^(-9)的标准。与传统沸石分子筛吸附机理不同,NATA-PH-1型催化剂能够在室温条件下诱导砷烷分解。其中砷键合在催化剂表面,氢气不属于半导体制程杂质。此催化剂在动态纯化试验中,砷烷分解容量达到4.5 L/L(线速率15 cm/s),且二次再生后仍保持高活性,与其较大的静态分解饱和量有关。目前,该催化剂已通过中试认证,已取得600 kg高纯磷烷(5 kg催化剂)。

NATA-PH-1 catalysts were synthesized and prove to be effective in eliminating arsine for which content about100 × 10^-6,in phosphine. Hence high purity PH3 with As H3 content lower than 30 × 10^-9were obtained,which achieve the certification about 100 × 10^-9for semiconductor process. Compared with zeolites adsorption process,NATA-PH-1 catalysts greatly induce the decomposition of arsine into as on the pores of catalysts through bonding connection and hydrogen which were allowed in semiconductor process. The penetrable decomposition capability under dynamic condition were about4. 5 L/L（ NATA-PH-1） for which the linear velocity is about 15 cm/s,and catalysts recover activity after regeneration process,which means the saturated decomposition capability under static condition would be much larger than 4. 5 L/L.After the pilot production,about 600 kg high purity PH_3 were obtained,which prove this catalysts are practicable.