教研资源共享的“微电子工艺实验”改革

“Microelectronic Technology Experiment” Reform Based on the Teaching and Scientific Research Shared Resources

为了加强学生对微电子制造过程的感性认识和对学科特点的认知,在原有的微电子平面工艺实验的基础上,对"微电子工艺实验"教学模式进行改革,引入氧化锌基薄膜场效应晶体管工艺制造技术及半导体测试分析实验,使教学与科研资源共享,建立了由教学内容的准备、多媒体教学、实际动手流片、完善有效的实验考核方案四部分组成的教学方式,激发了同学们学习的热情,取得了较好的教学效果。

Based on Microelectronics planar process experiment of the original, the ＂Microelectronic technology experiment＂ teaching mode is reformed. Introducing the ZnO - thin film field - effect transistor manufacturing technology and semiconductor test a- nalysis experiment, the teaching and research resources were shared. We established a new teaching pattern consisting of teaching con- tent preparation, multimedia teaching, hand on transistor processing and effective experiment appraisal scheme. These four measures successfully arouse students＇ enthusiasm for learning, and achieved good teaching effect.