Na/Mg共掺ZnO薄膜的溶胶-凝胶法制备及特性研究

Research on Preparation and Properties of Na/Mg Co-Doped ZnO Thin Films Prepared by Sol-Gel Method

利用溶胶-凝胶旋转涂膜法在耐热玻璃衬底上制备了不同膜厚的Na/Mg共掺ZnO薄膜。重点研究了膜厚对Na/Mg共掺ZnO薄膜结构和光学特性的影响。扫描电子显微镜（SEM）图像和X射线衍射（XRD）图谱分析结果表明,膜厚为200~500 nm时,随着膜厚的增加,薄膜的结晶性、致密性及c轴择优取向生长特性都呈现出先增强后降低的趋势。透射光谱分析结果表明,薄膜在可见光范围内的平均透光率随着膜厚的增加而显著下降。实验条件下,膜厚约为300 nm的Na/Mg共掺ZnO薄膜具有优良的结构特性和透光特性。荧光光致发光（PL）谱表明该薄膜中缺陷很少,是优良的紫外发光材料。

Na / Mg co-doped ZnO thin films with different thicknesses were prepared on pyrex glass substrates by the sol-gel spin-coating method. The influences of the thickness on the structure and optical properties of Na / Mg co-doped ZnO thin films were researched in detail. The results investigated by the scanning electron microscopy（ SEM） images and X-ray diffraction（ XRD） patterns show that within the thickness range of 200- 500 nm, the properties of crystallization, compactness and c-axis preferred orientation exhibit the trend of increasing first and deterioration afterwards with the increase of Na / Mg co-doped ZnO films thickness. The analyzed results of transmission spectra indicate that in the visible range of the electromagnetic spectra,the average transmittance decreases obviously with the increase of films thickness. Under experimental conditions,Na / Mg co-doped ZnO films with the thickness of about300 nm exhibit excellent structural and transmission properties. The photoluminescence（ PL） spectra show that the film is a good kind of ultraviolet emitting material with fewest defects.