摘要
针对一种基于微梁检测结构的新型双轴MEMS面内高量程加速度传感器,通过马歇特锤冲击校准装置和霍普金森杆冲击校准装置,测试了传感器的灵敏度和频响特性。试验结果表明:该传感器敏感结构X轴方向的灵敏度为0.470±0.03μV/g,幅值误差±5%时,工作频带为15.5 k Hz;Y轴方向的灵敏度为(0.517±0.03μV/g,幅值误差±5%时,工作频带为16.9 k Hz。该加速度传感器实现了硅平面内2个轴向的高g值加速度信号测量,可以用于后期集成三轴高量程加速度传感器。
A novel structure of the high-range accelerometer,which is based on micro detecting beam,was used to measure biaxial acceleration in the horizontal plane. Machete hammer and Hopkinson bar were used to test the sensitivity and the dynamic response of the sensor. The result shows the sensitivity of the accelerometer in X direction is 0. 470 ± 0. 03 μV / g,and the amplitude error of 5% operating band is 15. 5 k Hz. The sensitivity of the accelerometer in Y direction is 0. 517 ± 0. 03 μV / g and the resonant frequency is 54. 36 k Hz. The Amplitude error of 5% operating band is 16. 9 k Hz. The accelerometer enables the measurement of high-range acceleration biaxial signal in silicon plane,which can be used for future three-axis accelerometer.
出处
《仪表技术与传感器》
CSCD
北大核心
2016年第5期18-20,34,共4页
Instrument Technique and Sensor
