摘要
RF MEMS移相器与传统移相器相比,具有低损耗、频带宽、微型化,同时与IC、MMIC电路易于集成等特点,文中设计一种Ka波段DMTL型RF MEMS移相器,采用了15个MEMS电容式并联开关,同时在MEMS开关中加入MIM电容,实现了4位相移。文中对Ka波段4位RF MEMS移相器进行设计与分析,通过MEMS开关的切换实现信号延迟通路,0-180°步进22.5°的相移功能。通过改变驱动电压从而调整MEMS桥的高度,仿真测得开关理论下压电压为18.9 V。仿真结果表明在中心频率31 GHz时,其插入损耗大于-2.2 d B,回波损耗小于-25 d B,相移误差在1.5°范围内,移相器具有较好的移相性能。
RF MEMS has more advantages than traditional phase shifter,it has low loss,broad band,micromation and easy integration with the IC and MMIC. A Ka-band 4- bit distributed MEMS transmission line phase shifter was presented in the paper,which was composed of 15 MEMS capacitive shunt switches,and MIM capacity was plated in MEMS switch. Design and simulation of the phase shifter was reported,which achieves phase shifter from 0° to 180° with steps of 22. 5° by controlling RF MEMS switches on and off. By varing the driving voltage to change the height of the MEMS bridge,the measured pull-in voltage of MEMS switch is 18. 9V. Simulation results show that the insertion loss is higher than- 2. 2d B,and the return loss is lower than- 25 d B,with smaller than 1. 5°phase shifter error at 31 GHz. The function of phase shifter is good.
出处
《仪表技术与传感器》
CSCD
北大核心
2016年第5期29-31,43,共4页
Instrument Technique and Sensor
基金
国家863计划资助项目(2013AA041101)
