摘要
本文介绍了光刻机用碳化硅陶瓷结构件的特点及其对材料的要求,分析了碳化硅陶瓷在光刻机中作为结构件材料使用的优势,着重介绍了中国建筑材料科学研究总院在精密碳化硅结构件的制备领域所取得的技术成果,列举了精密碳化硅结构件在光刻机等集成电路制造关键装备中的应用。
Based on the introduction of the characteristics and requirements of structural ceramic components used in semiconductor especially lithography equipment, the application advantages of silicon carbide ceramics were analyzed. Then the technical achievements in the field of making high precision silicon carbide components made by China Building Materials Academy（CBMA） during the last 10 years were outlined. Typical silicon carbide components such as vacuum chuck, handling arms, trays, stage, integrated mirrors for stage which made by CBMA were also shown in this paper.
出处
《现代技术陶瓷》
CAS
2016年第3期168-178,共11页
Advanced Ceramics
关键词
碳化硅
凝胶注模
素坯加工
反应连接
化学气相沉积
集成电路
光刻机
Silicon carbide
Gel casting
Green ceramic machining
Reaction-bonding
CVD
Integrated circuit
Lithography equipment
