摘要
单片表面微机械三轴角速度陀螺仪芯片在华润上华0.18um工艺平台上流片验证。传感器控制芯片采用自动归零和斩波两种技术减小1/f噪声和热噪声。前端放大电路不仅放大角速度信号,同时去除来自传感器驱动信号的剩余信号。
A monolithic surface micro-machined triaxial process. The on-chip position sensor control circuit uses angular velocity gyroscope is fabricated with 0.18urn CMOS the two noise reduction techniques of Autozeroing and chopper stabilization methods to reject 1/f and thermal noise. Pre-amplify circuit not only enlarge the vibratory rate, but also cancel the residue from the driver signal.
出处
《中国集成电路》
2016年第6期26-29,50,共5页
China lntegrated Circuit
关键词
微机械
角速度
陀螺仪
低噪声
MEMS
angular velocity
Gyroscope
low noise
