温度补偿型光纤光栅位移传感器

Temperature Compensated Optical Fiber Grating Displacement Sensor

基于等腰三角形悬臂梁和双光纤光栅结构设计并制造了一种高分辨率、温度自补偿的光纤位移传感器。采用光谱分析法对测量结果进行解调，常温下的实验结果表明，传感器的量程为0～70 mm，灵敏度为21.9 pm/mm，线性拟合度高达0.999，重复性误差为4.72%FS，迟滞误差为2.70%FS。而且在0～60℃温度范围内的零漂为0.41 pm/℃，温度性能良好。该传感器能很好的应用于水利水电工程、工业与民用建筑等结构上裂缝或接缝开合度的长期监测。

Based on isosceles triangle cantilever beam and double fiber Bragg grating structure,a kind of tempera-ture self-compensated fiber optic displacement sensor with high resolution is designed and manufactured. The mea-surement result is demodulated by spectrum analysis method. The experimental results under the normal tempera-ture environment show that,the range of the sensor is 0~70 mm,the sensitivity is 21.9 pm/mm,the degree of linear fitting is as high as 0.999,the repeatability error is 4.72%FS and the hysteresis error is 2.70%FS. In the tempera-ture range from 0℃to 60℃,the zero drift is 0.41 pm/℃,so temperature performance is good. The sensor can be well applied in long-term monitoring of the cracks or seam open degree in the water conservancy and hydropower en-gineering,industrial and civil buildings.