新型MEMS压电微能源驱动的乳化液泵站ZigBee振动监测系统研究

Study on ZigBee Vibration Monitoring System for Emulsion Pump Station Driven by a Novel MEMS Piezoelectric Micro-Energy

为确保矿用乳化液泵站安全运行,提出一种基于新型MEMS压电能量收集器的振动状态监测系统。器件为8悬臂梁-中心质量块结构,利用MEMS加工工艺制造,总体尺寸为7 000μm×7 000μm×400μm;能源管理模块以LTC3331为核心设计,可稳定输出3.3 V直流电压;无线传感网络基于ZigBee技术构建,终端节点的振动加速度采样率控制在10 Hz。经振动台系统测试表明,微能源阵列输出电压最大可达1.47 V,系统供电稳定性较好;在30 m内节点具有良好的传输可靠性和实时性。

To ensure the safe operation of mine emulsion pump station,a vibration monitoring system based on nov-el MEMS piezoelectric energy harvester is proposed. The device is fabricated by using the MEMS micromachining process,which has the structure of eight cantilever beams-center mass block and the overall dimension of 7 000μm×7 000μm×400μm;the energy management model with the core of LTC3331 is designed,which could stably output DC voltage;the wireless sensor network is constructed by using ZigBee technology,and the end-device oper-ates with a sampling rate of vibration acceleration at 10 Hz. The shaking table system test shows that micro-energy arrays could output a maximum value of voltage at 1.47 V,power supply for the system presents good stability;the communication between two nodes shows great reliability and real-time performance within 30 m.