射频感应耦合等离子体朗缪双探针诊断分析

Langmuir double probe diagnostic analysis of RF inductively coupled plasma

采用朗缪探针法对射频感应耦合等离子体进行了诊断分析,得到了圆柱形ICP放电装置的电子密度和电子温度。通过朗缪双探针研究了不同放电气压、不同射频功率、不同放电位置、不同气体组分对等离子体参数的影响。一定功率下,电子密度在30Pa-100Pa之间随气压的增加而增大,在100Pa-160Pa之间随气压的增加而减小,电子温度在30Pa-160Pa之间随气压的增加而减小;一定气压下,电子密度在50W-1900W之间随功率的增加逐渐增大,电子温度在50W-900W之间随功率的增加而减小,在900W-1900W之间随功率的增加而增大。等离子体辉光区域不同位置的电子密度和电子温度各不相同,电子密度大的位置具有较低的电子温度。氩氮混合气体的电子密度随着气压的增加而减小,氮气在混合气体中的比例越高混合气体的电子密度越小;氩氮混合气体相比纯氩有着更高的电子温度,且氮气含量越高混合气体的电子温度也越高。

We used the Langmuir probe method to analyze the RF inductively coupled plasma, the electron density and electron temperature of the cylindrical ICP discharge device were obtained. The plasma parameters were studied by the Langmuir double probe with different discharge pressure, RF power, discharge location and gas composition. Under a certain power, the electron density increased with the increase of the pressure at 30Pa-100 Pa, and decreased with the increase of the pressure at100Pa-160 Pa, the electron temperature decreased with the increase of the pressure at 30Pa-160 Pa. Under a certain pressure, the electron density increased with the increase of the power at 50W-1900 W, and the electron temperature decreased with the increase of the power at 50W-900 W, and increased with the increase of the power at 900W-1900 W. The electron density and electron temperature in different positions of the plasma glow region were different. The position with high electron density had a low electron temperature. The electron density of argon nitrogen mixture decreased with the increase of pressure, and the electron density of the mixed gas was smaller accompanying with the higher proportion of nitrogen. The electron temperature of argon nitrogen mixture was higher comparing with that of pure argon, and the electron temperature of the mixed gas was higher accompanying with that with higher nitrogen content.