工程型高温度梯度单晶炉的控制系统设计

Control System Design of Engineering Type High Temperature Gradient Single Crystal Furnace

对工程型高温度梯度单晶炉控制系统进行设计,从抽拉系统、液压倾转浇注系统、高温度梯度热场的控制三方面改进了原有控制系统设计的不足,使单晶炉控制系统达到国内先进水平,单晶叶片的成品率提高了1 0%。

The design of the control system of a single crystal furnace with high temperature gradient is completed. The shortcomings of the original control system design are improved from three aspects： the pulling system, the hydraulic tilting pouring system and the control of the high temperature gradient thermal field. The single crystal furnace control system has reached the advanced level in China. The yield of single crystal leaves increased by 10%.