硅片上下料设备中精度公差对稳定性影响的分析

Analysis of the Influence of Accuracy、Tolerance on Stability of Wafer Automatic Device

主要阐述了生产过程中硅片自动化上下料设备的设计精度、装配精度对设备稳定性的影响情况;具体分析了单个机构的精度、公差,机构之间的公差在生产中的影响;总结了相关机构应遵循的精度、公差要求;对其他自动化设备如石墨舟上下料、石英舟上下料设备的研制与提高稳定性、可靠性也有借鉴、指导作用。

Mainly elaborated in the production process,wafer automatic feeding equipment design precision and assembly precision influence on the stability of the equipment; specific analysis of individual institutions of precision,tolerance,mechanism between the tolerances in the production effect; a summary of the relevant agencies should follow the precision,tolerance requirements; the other automation equipment,such as the graphite boat material,quartz boat material equipment development and improving the stability and reliability also reference and guidance.