热丝CVD金刚石涂层膜基界面结合强度研究新进展

New progress on the improvement of adhesive strength of HFCVD diamond coating

硬质合金基体金刚石涂层工具产业化应用的主要障碍之一在于涂层的膜基界面结合强度较差,易引发涂层早期脱落。提高膜基界面结合强度、保证刀具正常使用寿命,已成为金刚石涂层工具产业化亟待解决的主要问题。我们介绍了近年来在提高硬质合金基体金刚石涂层膜基界面结合强度方面所取得的一系列研究新进展,并提出了进一步改善其膜基界面结合强度的新思路,以促进热丝CVD金刚石涂层工具的产业化应用。

Diamond coated cemented carbide cutting tools have a broad industrial application prospect,while one of the main obstacles that hinder the application of the coating is that the adhesive strength of film-substrate interface is poor,which seriously affects its normal service life.Therefore,improving the film-substrate adhesive strength and ensuring the normal service life of the tool have become the main problems to be solved when industrializing diamond coated tools.In this paper,a series of new achievements on improving the film-substrate adhesive strength of cemented carbide substrate diamond coating has been introduced,and new ideas for further improvement are proposed in order to promote the industrial application of the hot filament chemical vapor deposition（HFCVD）diamond coated tools.