微陀螺仪检测控制系统设计与实现

Design and Realization of the Detection and Control System for Micro-gyroscope

针对微陀螺仪开环检测的不足,在电容平衡梳齿微结构的基础上,提出了基于FPGA的微陀螺仪闭环检测控制方案。设计了电容电压变换及调理电路,得到了反映梳齿电容振动情况的电压信号。以FPGA为数字信号处理平台,设计了信号生成电路、自适应正交解调电路和校正电路,实现了对微陀螺仪信号的解调和处理。结合A/D和D/A变换,构建了微陀螺仪闭环检测系统。试验结果表明,在设计的闭环检测平衡回路控制下,微陀螺仪的标度因数线性度和对称性较开环检测时均有较大程度的提高,测量范围、阈值和分辨率等性能指标也得到了不同程度的改善。

Aiming at the deficiency of open - loop detection for micro - gyroscope,on the basis of the micro - structure of capacitance balance comb teeth, the closed - loop detection and control scheme based on FPGA is put forward. The capacitance/voltage transformation and conditioning circuit are designed,and the voltage signal reflecting the capacitance vibration of comb teeth is acquired. With the FPGA as the digital signal processing platform,the signal generating circuit,adaptive orthogonal demodulation circuit and correction circuit are designed,and the demodulation and processing of the signals of micro -gyroscope are implemented. Combining with A/D and D/A conversion,the closed loop detection system of micro gyroscope is constructed. The experimental results show that under the control of closed loop detection balance loop, the linearity and symmetry of the scale factors of micro gyroscope are better than those of open loop detection. The performance indexes, including measurement range,threshold and resolution have been improved at some extent.