碳纳米管基纳米器件规模化装配技术

A Nanoscale Technique for the Large-scale Assembly of Carbon Nanotubes Device

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摘要以典型纳米器件一单壁碳纳米管场效应晶体管的装配制造为例，进行了规模化装配制造实验研究。采用浮动电势介电泳方法在每平方厘米装配上了六百对器件。实验结果表明本方法实现了规模化装配，且成功率较高。 This paper is to the assembly and fabrication for typical nano device-SWCNT FET for example, facing the large-scale assembly and fabrication for nano devices, and carrying out the experimenal research. Assembly method of SWCNTs FET is by floating potential and dieleetrophoresis principle. Six hundred devices are assembled less than per square centimeter. The experimental results show that large-scale assembly is realized, and the success rate of ideal assembly for SWCNTs FET is achieved.

作者许可戚爰伟刘西洋

机构地区沈阳建筑大学信息与控制工程学院

出处《纳米科技》 2015年第6期43-47,共5页

关键词纳 assembly large-scale SWCNT FET floating potential dielectrophoresis

分类号 TB34 [一般工业技术—材料科学与工程]

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1Lee D, Cui T H. Suspended carbon nanotube nanocom- posite beams with a high mechanical strength via layer- by-layer nano-setf-assembly. Nanotechnology, 22 (4) , 165601-165609 (2011).
2M. Rinkio, A. Johansson, and G. S. Paraoanu, et al. High-speed memory from carbon nanotube field-effect transistors with high-k gate dielectric. Nano Letters, 9 (3) , 643-647 (2009).
3Z. G. Zhu, L. Garcia-Gancedo, and A.J. Flewitt, et al.Design of carbon nanotube fiber microelectrode for glu- cose biosensing. Journal of Chemical technology and biotechnology, 86 (4) , 256-262 (2012).
4Y. Zhao, D. Candebat, C. J. Delker, et al., Understand- ing the impact of Schottky barriers on the performance of narrow bandgap nanowire field effect transistors. Nano Lett.,12 (10) , 5331-5336 (2012) .
5K. Xu, Z. 1. Dong, and X. J. Tian, et al. Assembly and Fabrication of Single-Walled Carbon Nanotube Field Effect Transistor Using Dielectrophoresis Method. Inte- grated Ferroelectrics, 127 (1) , 21-27 (2011).
6S. Virendra, J. Daeha, and Z. Lei. Graphene based ma- terials: Past, present and future. Progress in materials science, 56 (3) , 1178-1271 (2011).
7S. R. Shin, C. Shin, and A. Memie, et al. Aligned Car- bon Nanotube-Based Flexible Gel Substrates for Engi- neering Biohybrid Tissue Actuators. Advanced Func- tional Materials, 12 (6) 1379-1385 (2015) .
8G. Yu, A. Cao, and C. M. Lieber. Large-Area Blown Bubble Films of Aligned Nanowires and Carbon Nan- otubes. Nature Nanotech, 2 (4) , 372-377 (2007).
9N. Patil, A. Lin, and E. R. Myers, et al. Wafer-scale Growth and Transfer of Aligned Single-Walled Carbon Nanotubes. IEEE Trans. on Nanotech. 8 (4) , 498-504 (2009).

1Doug Smock.着眼微观关注耐用性[J].工业设计,2009(3):31-32.
2用纳米装配技术开发新型复合功能材料[J].金属功能材料,2016,23(5):60-60.
3姚春.制冷压缩机如何进行总装配[J].家电检修技术,2009(8):35-36.
4郑秀楠.复合材料舵面固化段装配技术[J].科技创新与应用,2015,5(24):109-110.
5金耀峰.蒸发器装配技术[J].长岭技术,2001(3):21-24.
6道康宁有机硅新材料助推玻璃装配技术[J].有机硅氟资讯,2008(10):3-3.
7蒋旭,张丛权,燕春福,岳澜宁,刘景武.开封空分特大型空分设备研发现状[J].深冷技术,2013(5):31-35. 被引量：1
8李玉魁,朱长纯.三极CNT-FED的封装技术制作研究[J].西安科技大学学报,2005,25(4):511-513.
9黄改燕,陈长鑫,张亚非.单壁碳纳米管场效应晶体管的制备工艺研究[J].微纳电子技术,2008,45(2):78-82.
10锄禾.纳米技术进入无线应用领域[J].电子设计应用,2003(7):11-12.

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碳纳米管基纳米器件规模化装配技术

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