新型气体静压支承技术的研究

Research of a new hydraulic pressure supporting technique

介绍了气体静压支承的工作原理,针对精密加工设备开式气体静压支承工作过程中存在的漂移和运动不稳定问题,提出采用负压发生器与节流器相结合的新型负压吸附静压支承技术,应用仿真软件对负压吸附静压支承中的小孔节流和多孔质节流形式进行了分析探讨,分析了负压吸附静压支承的工作原理、间隙压力计算方程和气膜刚度的计算;通过试验测试分析该技术,保证了开式气体静压导轨所需的气膜厚度和刚度;将该技术应用到精密数控机床导轨中,使机床抗振性和运动精度得到提高。

Introduces the working principles of aerostatic supporting. Aiming at the problems of the drift and instability for precision machining equipments in open-type aerostatic pressure working process,it introduces a new vacuum suction supporting technology that combining vacuum suction generator and flow rate controller. By emulation software, it analyzes the throttling modes of pinhole throttle and multi-hole throttle in the vacuum suction static pressure supporting, analyzes the working principles of vacuum suction static supporting, computation equation of clearance pressure and stiffness computation. By test analysis of this technology, it insures the film thickness and stiffness required by open-type aerostatic guide. And by application of this technology to precision machine tools, it increases performance of the anti-vibration and movement accuracy.