PID温度控制在真空镀膜机应用研究

Application of PID temperature control in vacuum coating machine

在自动化控制领域内,PID控制器具有结构简单、容易实现、控制效果好等特点,是迄今为止最稳定的控制方法。高真空镀膜机的温度控制在镀膜过程中起着十分重要的作用,控制温度的精准与否将直接影响空间用太阳电池成膜质量,研究了PID算法的原理和实现方法,将其应用到真空镀膜机温度控制系统中,并且摸索出相应参数整定的方法规律,可以满足工艺所需要的各种温度。

In the field of automation control, PID controller has the characteristics of simple structure, easy to implement, good control effect and so on, the most stable control method by far. The temperature control of the high vacuum film coating machine plays a very important role in the process of coating. Precise control of temperature has a direct impact on the quality of space solar cells. The principle and implementation method of PID algorithm were studied. It was applied to the temperature control system of vacuum coating machine, and the method of the corresponding parameter setting was find out. It can meet the needs for the various temperature of process.