摘要
提出了一种基于微机电系统(MEMS)的全新横向加工毫米级可变喷口角度微型固体火箭发动机的设计、加工和点火试验。微型火箭发动机是理想的高精度、高推重比的动力系统。在微型航天器的姿态调节、速度控制、重力补偿及轨道变更方面都有很大的作用。该新型发动机由本征硅和BF33玻璃阳极键合而成,主体由燃烧室、尾喷管和通气槽等结构组成。主体结构利用MEMS体加工技术中干法刻蚀工艺横向加工于本征硅片表面上,实现尾部喷管角度的可调节,优化了推力的作用效果,简化了加工工艺流程,增加了加工精度。发动机燃料采用HTPB复合燃料。文中详细介绍了横向加工工艺的流程、燃料的制备和填充技术,详述了发动机的点火试验。
The design,fabrication and experiment of a novel micro solid propellant rocket engine with a changeable nozzle is presented.Micro rocket engine is an ideal high-accuracy and high thrust-weight ratio power system.It plays an important role in the attitude control, speed adjustment ,gravity compensation and orbit change of microspacecraft.The presented engine is made by bond- ing the fabricated silicon plate with BF33 glass.The engine consists of a combustion chamber, three venting channels and a nuzzle. The main structure of the engine is manufactured on the plane of a silicon plate using the MEMS DRIE technology.The fabrication direction is cross direction, allowing the nozzle to be changeable.This helps improve the efficiency of the propelling engine, simplify the fabrication process and increase the precision of the fabrication.The propellant chosen for the engine is the HTPB compound pro- pellant.The cross-direction fabrication process, the preparation and installation of the propellant and the ignition experiment of the engine is presented in detail.
出处
《固体火箭技术》
EI
CAS
CSCD
北大核心
2016年第3期327-332,352,共7页
Journal of Solid Rocket Technology
关键词
毫米级
固体燃料
火箭发动机
MEMS技术
millimeter-scaled
solid propellant
rocket engine
MEMS technology