摘要
本文从氦气回收系统的基本原理出发,提出提高氦气回收系统回收率方法,通过实验分析,确定参与系统负压回收的回收泵的泄漏率的范围,以及改进后系统的回收率。
This paper purposed a new method to improve helium recovery system recovery efficiency, which based on the principle of helium recovery system. Through the experimental research, we obtained the leakage rate scope of the pump that working in negative pressure system.
出处
《中国仪器仪表》
2016年第7期39-42,共4页
China Instrumentation
基金
国家重大科学仪器设备开发专项(2012YQ220084)
关键词
氦气检漏
氦气回收系统
回收率
Helium mass spectrometer leakagedetectingHelium recovery systemRecovery efficiency
