无焦压缩光路系统的计算机辅助装调方法

Computer-aided alignment method in afocal compressed optical path system

为了解决随机成分多、调节灵敏度高的离轴反射式系统的精确装调问题,介绍了干涉测量与计算机优化技术相结合的方法,建立了各元件失调量与初级像差之间的关系,以及元件间的像差相互补偿关系,通过干涉测量采集系统全视场的波前差,反向优化得到各元件的失调量,在波长为632.8nm时,无焦压缩光路系统全视场平均出射波前优于RMS0.055λ,压缩比误差小于5‰,实现了无焦压缩光路系统高精度、高效率的装调。

To solve the alignment for the off-axis mirror with more variable and high sensitivity,we introduced the computer-aided interferometry technology,built the relationship between the misalignment and primary aberration,as well as the mutual compensatory relationship of each element.Moreover,we accomplished the systematic assembly and adjustment efficiently and speedily by collecting system＇s wave-front aberration through interferometry,obtained the misalignment of each element through the reverse optimizing analysis.Results show that the final wave-front error of the afocal compressed optical path system is better than 0.055λRMS atλ= 632.8nm across all image plane,and the compression ratio is less than 5‰.