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0.18μm完全隔离型低导通态电阻(Low Ron)NLDMOS研究 被引量:1

Studies of 0.18 μm Fully Isolated Low R_(on) NLDMOS
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摘要 介绍一组基于0.18μm逻辑平台构建的低导通态电阻(Low Ron)NLDMOS。该组LDMOS涵盖10~30 V应用电压。该NLDMOS为完全隔离型,因而其源端和漏端均可以独立于衬底加偏压。针对Drift区域和Body区域分别进行结构优化,最终得到性能良好的低导通态电阻(Low Ron)NLDMOS。其导通态电阻(Ron)为4.4 mΩ·mm-2对应击穿电压(BV)~20 V,21 mΩ·mm-2对应击穿电压(BV)~41 V。 ThepaperpresentsagroupofLowRo.NLDMOSbasedon0.18 μm logic platform that covers applied voltage ranging from 10-30 V. The fully isolated nature biases the source/drain electrodes with different voltages from the substrate potential. Structures of Drift side and Body side have been optimized to obtain well-performed Low Ron NLDMO S of which Ron reaches 4.4 mΩ. mm-2 at 20 V (B V) and 21 mΩ. mm^-2 at 41 V (B V).
出处 《电子与封装》 2016年第7期39-43,共5页 Electronics & Packaging
关键词 LDMOS 低导通态电阻 完全隔离型 LDMOS low Ron fully isolated
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