摘要
通过脉冲叠加直流偏压电弧离子镀设备制备Ti/TiN涂层,并进行了氧化试验。利用XRD、SEM、XPS对氧化后的涂层进行分析。结果表明,450℃以上,Ti/TiN涂层的力学性能急剧下降,在500℃时开始有大量TiO_2生成,完全氧化后的TiO_2区域以白亮层形式存在。
Ti/TiN coatings were deposited by pulse superposition DC bias arc ion plating equipment. The oxidation experiment was carried out. The coatings after oxidation were analyzed by XRD, SEM and XPS. The results show that the mechanical properties of Ti/TiN coating decrease sharply above 450 ℃, and a large number of TiO2 phases appear at 500 ℃, and then the zone of TiO2 after complete oxidation exists in the form of white layer.
出处
《热加工工艺》
CSCD
北大核心
2016年第14期144-147,共4页
Hot Working Technology
基金
江苏省普通高校研究生科研创新计划(CX10B_001X)
