光刻机双工件台控制系统任务调度设计

Task Scheduling Designation for Dual-Stage Control System of Lithography

双工件台系统是光刻机控制系统的核心,在换台系统下工件台要实现两个工件台互换,换台过程复杂且需要宏动电机的配合,为了保证此过程的安全性又有很多的保护限制,过程中对于上位机的一些指令需要实时响应,这对光刻机控制系统的任务调度有很高的要求,既需要实时性,又需要调度的合理性。控制系统采用Vx Works嵌入式实时操作系统,在Vx Works中进行任务调度处理,控制整套系统的执行。本文介绍一种在双工件台系统中使用Vx Works嵌入式操作系统进行任务调度的设计方法。

Dual-stage system is the core of the lithography machine control system. This system is designed to realize the exchange of two stages. This process is very complex and needs to cooperate with macro motors. In order to achieve this process safely, there are many restrictions that should be considered. Besides the command given by upper computer should be executed in time. So reasonable task scheduling is very important and should be dealed with some urgent requests in time. This designation is based on the embedded real-time operating system, VxWorks, to control the whole system. And task scheduling in VxWorks is managed to control the whole system. This paper introduces a method to achieve task scheduling of the dual-stage system of lithography.