主轴回转精度测试方法研究

Method research of spindle rotation precision test

回转精度是衡量超精密主轴的关键技术指标。传统的回转精度测试方法存在不足,如单点法和2点法不能实现误差分离;多步法需要进行多次精确转位,不利于在线测量;传统3点法可实现误差分离,但存在原理误差,不能分离主轴回转误差中的一次成分等。文中提出了一种工程测试3点法,该方法采用3个传感器在被测件上严格定点采样;利用3点法圆度误差分离技术分离出被测件圆度误差,利用2点法偏心误差分离技术分离出测试系统偏心误差;从实时采样数据中剔除被测件圆度误差及偏心误差,实现主轴回转误差在线测量及状态监测。揭示了单周采样点数、传感器安装角、偏心误差、传感器误差及角位置误差等因素对3点法测试精度的影响规律,对工程测试3点法的参数选择及形状失真进行了综合分析和优化。试验结果表明:文中所提方法有效。

Rotation precision is the key technology index of measuring ultra-precision spindle performance. The traditional rotation precision measuring method existed many problems, such as one-point and two-point methods can＇t realize error separation; multi-step method need transposition for many times and was difficult to measure online. The traditional three-point method can realize error separation. However, the principle error was existed and the one-time cost of spindle rotation error can＇t be separated. A kind of three-point engineering test method for spindle rotation accuracy test was proposed based on the analysis of the existed spindle rotation error measurement method. Three sensors were used to sampling on the fixed sampling points of the device. The roundness error of the device was separated using three-point method roundness error separation technology. The eccentric error of the test system was separated using two-point method eccentric error separation technology.The roundness and eccentric errors of the device were removed from the real-time sampling data to realize the online measurement and status monitor of the spindle rotation error. The effect of sampling points, sensor installation angle, eccentric error, sensor errors, sensor angular position error and other factors on the three-point test method was revealed. The comprehensive analysis and optimization were performed on the parameter selection and shape distortion of the three-point engineering test method. The proposed method was verified by various experiments.