使用冷场扫描电镜进行电子背散射衍射测试的困难与解决方法

Difficulties and Solutions of Electron Back Scattered Diffraction Testing by Cold Field Emission Gun SEM

针对部分冷场扫描电镜进行电子背散射衍射测试时遇到的困难和误区,指出冷场扫描电镜的束流与稳定性能够满足电子背散射衍射测试的表征要求。提出了针对半浸没式物镜的结构,应优先在低倍模式下进行电子背散射衍射测试,高倍模式下测试应使用磁场校正,并指出在低倍放大下应注意低倍位置校正的问题。对于冷场扫描电镜,通过以上方法,大部分电子背散射衍射测试都可以正常进行。

In view of some difficulties and misunderstandings of electron back scattered diffraction（EBSD）testing by cold field emission gun SEM（CFEG-SEM）,it was pointed out that the current intensity and stability of CFEG-SEM could meet the characterization requirement of EBSD testing.For the problem of snorkel lens,EBSD test should proceed in low magnification mode preferentially,and magnetic field rectification should be done while in high magnification mode.It was also pointed out that position calibration should be paid attention to while in low magnification mode.Through above solutions,most EBSD tests could be carried out properly.