T型空气静压轴承止推方向承载特性研究

STUDY ON THE AXIAL BEARING CAPACITY OF T AEROSTATIC BEARING

金刚石飞切机床使用的T空气静压轴承小幅度的轴向以及轴线的偏转振动对于超精密加工来说是无法忽略的,因此在其设计、参数优化以及加工使用工程准确得出其轴向承载能力(承载力和止推刚度)是非常重要的,由于工程实际中对T型空气静压轴承轴向承载能力进行测试时,存在很多误差项,比如加工误差、环境因素(温度、湿度等)对微位移测量装置的影响、加载时结构件本身的变形和偏摆等,这导致测试的刚度值与实际值之间的误差较大,通过有限元仿真研究了T型空气静压轴承轴向承载能力,如节流孔数量和供气压力对T型空气静压轴承轴向承载能力的影响等,并通过实验验证了仿真结果的准确性。

Even a small axial vibration or an axis deflection vibration of the aerostatic bearing of DFC tool can be quite significant for ultra-precision machining. It is of great importance to obtain the accurate axial bearing characteristic（ bearing capacity and thrust stiffness） during its design,parameter optimization,machining and using process. However,there exists many error terms in the engineering practice to test the axial bearing capacity（ thrust bearing capacity） of T aerostatic bearing,such as, the machining error, effect of environment factors（ temperature, humidity, etc.） on the micro-displacement measurement device,deformation and deflection of the structure itself during the loading process,etc. All these lead to a large error between the measurement stiffness value and the actual value. Based on these problems,this article studied the axial bearing capacity（ thrust bearing capacity） of T aerostatic bearing by means of finite element simulation. Meanwhile,the influence of orifice number and air supply pressure on the axial bearing capacity（ thrust bearing capacity） of T aerostatic bearing is also studied and the accuracy of the simulation results has been validated by the carried out experiment.