压电陶瓷装置微位移的光学测量与控制技术

Optical Measurement and Control of Micro Displacement for A Piezoelectric Device

微位移装置是指在外力或者电场、磁场等作用下,直接或间接由微结构杠杆放大产生精密微量移动,实现精密定位的装置,例如采用压电陶瓷的逆压电效应、由电压控制产生微位移蠕动。以干涉仪中移相器为典型微位移装置代表,总结多年来科研工作中对微位移装置伸长量的测量与在线标定方法,实现了干涉仪中步长为λ/8(λ=632.8 nm)的准确移相;通过研究基于电容器件的位移反馈,实现了分辨率优于10 nm的精密定位。

Micro displacement is precisely produced either directly by squirm movement, of indirectly by the enlargement effect from the lever with microstrueture, driving by the external force, electric field or magnetic fieht on the micro displacement devices. For example, the piezoelectric transducer is driven by the voltage, to squirm with rnicro displacement, based on the converse piezoelectric effect. In this arlicle, we summarize measureme,lt and calibration methods of micro displacement of the PZT used as phase shifter of the interferometer to guarantee a phase-shifting step of λ/8 （λ = 632.8 nm）, based on the researches of our group in recent years. The precise positioning with resolution better than 10 nm is achieved hy displacement sensing utilizing the feedhaek of a capaeilor on the PZT.