摘要
本文介绍了一种基于迈克耳孙干涉技术的位移测量系统,给出了系统的组成、工作原理及理论依据;采用条纹细分、激光稳频、公式修正减少了可能的误差来源;用角锥棱镜取代平面镜,及平衡电桥电路设计和相敏检波技术,有效地提高了系统的抗干扰性和稳定性;具有光路简单、精确度高、成本低的特点,有一定的应用前景和学术参考价值.
Based on the technology of Michelson interference system,this paper introduced a displacement measuring system,which provided the theoretical basis of the composition and working principle,using the fringe subdivision technology,laser frequency stabilization technology,the correction formula to reduce the sources of the possible error.The system used in the design of the prism replacing plane mirror,balanced bridge circuit design and phase-sensitive detection technique,effectively improve the anti-interference of the system and the stability of the circuit,it has a simple optical path design,high precision measurement results,the characteristics of the design system of low cost,have certain application and reference value.
出处
《物理与工程》
2016年第4期75-78,共4页
Physics and Engineering
基金
安徽省教育厅重点项目号:KJ2016A673
校级重点项目号:2015xj11zd
关键词
迈克耳孙干涉仪
干涉技术
相位调制
测量系统
Michelson interferometer
interference technology
phase modulation
measurement system
