摘要
阐述了基于相位差异(PD)的波前传感技术的基本原理;仿真分析了PD技术的噪声适应性及探测器离焦误差对精度的影响;利用PD技术的波前传感结果分别辅助装调了离轴、同轴三反光学系统,并分别将多视场的波前图与干涉检验的结果进行对比。实验结果表明,利用PD技术可实现三反光学系统的波前传感及辅助装调。与干涉检验的结果相比,波前传感结果的RMS偏差均优于0.02λ,检测精度满足工程需求。
The basic principles of wavefront sensing technology based on phase diversity（PD）are discussed.The noise adaptability of the PD technique and the influence of the detector defocus distances error on the accuracy are analyzed.PD technology is applied to assisted align off-axis and coaxial three-mirror reflecting optical system,and the wavefront maps of multiple fields of view are compared with interferometric test results.Experimental results show that wavefront sensing and assisted alignment of three-mirror reflecting optical system can be realized by using PD technology.Compared with the results of interferometric test,results of wavefront sensing are all better than0.02λ RMS.The accuracy can satisfy the requirement of engineering.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2016年第7期123-130,共8页
Acta Optica Sinica
基金
国家自然科学基金(61036015)
国家973计划(2011CB0132005)
关键词
成像系统
相位差异
波前传感
离轴三反光学系统
同轴三反光学系统
辅助装调
imaging systems
phase diversity
wavefront sensing
off-axis three-mirror reflecting optical system
coaxial three-mirror reflecting optical system
assisted alignment
