0.55～0.85μm波段增透膜的相位调控设计与研制

Design and Fabrication:Phase Modulated Antireflection Coatings in 0.55～0.85μm Waveband

在0.55～0.85μm波段范围内,在保证薄膜高透射率的同时对其相位进行调控,是多偏振成像模块项目研制的关键技术。采用等效膜层理论,使用三种氧化物薄膜材料：Ta2O5、Al2O3、SiO2,在光学玻璃H-LaK4L基底上设计并制备了相位调控增透膜。经过工艺优化,研制结果表明,在28°入射条件下,0.55～0.85μm的波段范围内,薄膜平均透射率大于97%,其相位差小于1°。膜层能够经受航天光学薄膜产品的环境实验的检验,满足了项目的可靠性要求。

In the waveband of 0.55～0.85μm,how to modulate the phases while ensuring high transmittance of thin films is the key technology of multiple polarization imaging module project.Phase modulated antireflection coatings has been designed and fabricated on the substrate H-LaK4L（optical glass）by utilizing asymmetry equivalent layers theory and using three types of oxide coating materials：Ta2O5、Al2O3、SiO2.After process optimization,in the waveband of 0.55～0.85μm and with the incidence angle of 28°,the results indicate that the average transmittance is greater than 97% while phase difference is less than 1°.The coatings can pass the environmental test required for space optical thin film products,and meet the reliability requirement of the project.