CaMn_7O_(12)块材的烧结与薄膜制备探究

Sintering of CaMn_7O_(12) Bulk and Thin Film Preparation

利用固相烧结法制备了多铁性材料CaMn_7O_(12)多晶块材,断面扫描电子显微镜(SEM)形貌图显示样品的结构致密.以CaMn_7O_(12)多晶块材为靶材,利用磁控溅射方法在Sr Ti O3(STO)基片上制备CaMn_7O_(12)薄膜,XRD的θ-2θ扫描说明在STO(001)和STO(111)基片分别得到了CaMn_7O_(12)(003)薄膜和CaMn_7O_(12)(600)薄膜.原子力显微镜(AFM)扫描的薄膜表面形貌清晰,结合薄膜生长的晶格匹配度,分析CaMn_7O_(12)(003)薄膜和CaMn_7O_(12)(600)薄膜的生长.

Multiferroic CaMn7O（12） polycrystalline bulk sample was fabricated using solid state sintering method. The scanning electron microscopy（ SEM） image shows that the sample has compact structure.With CaMn7O（12） polycrystalline materials for target material,using magnetron sputtering method in Sr Ti O3（ STO） CaMn7O（12） film substrate preparation,XRD θ-2θ scans showed that in STO（ 001） and STO（ 111）substrate respectively got CaMn7O（12）（ 003） film and CaMn7O（12）（ 600） film.The atomic force microscope（ AFM） scanning shows the membrane surface morphology is clear.In combination with the lattice matching degree film of growth,the growth of CaMn7O（12）（ 003） film and CaMn7O（12）（ 600） film is analyzed.