期刊文献+

靶电流对磁控溅射减摩复合镀层组织与性能的影响 被引量:8

Influence of Target Current on the Microstructure and Properties of the Antifriction Composite Coatings Prepared by Magnetron Sputtering
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摘要 目前我国溅镀轴瓦依赖进口.采用非平衡磁控溅射在轴承合金表面制备了AlSn20/C复合镀层,分析了碳靶电流的改变对轴承合金表面复合镀层的表面形貌、硬度、耐蚀性、膜基结合力以及摩擦系数等的影响.研究结果表明:当碳靶电流在1.0~1.2A时,非平衡磁控溅射AlSn20/C复合镀层;当碳靶电流为1.0A时,镀层表面组织均匀,铝原子、锡原子和碳原子达到最佳匹配;当碳靶电流在1.0~1.2A时,镀层硬度与碳靶电流成反比,当其为1.0A时,镀层硬度最高为601HV0.025,结合力最高可达33N,镀层的摩擦系数最低达到0.12. The bearing prepared by magnetron sputtering depends on importing.The AlSn20/C composite coatings on bearing alloy were prepared by magnetron sputtering.The influence of graphite target current on the microstructure,hardness,corrosion resistance,bonding force and friction coefficient was analyzed.The results show:While the graphite target current is 1.0 A,the surface structure is uniform,the atoms of Al and Sn match well.The hardness of the coating is inversely proportional to the graphite target current,in the scope of 1.0~1.2 A.While the graphite target current is 1.0 A,its hardness is the hardest,i.e 601 HV0.025,the bonding force between coating and matrix is 33 N,and the friction coefficient achieves 0.12.
出处 《西安工业大学学报》 CAS 2016年第6期481-484,共4页 Journal of Xi’an Technological University
基金 陕西省西安市科技计划项目(CXY1442(2)) 陕西省自然科学基础研究计划项目(2014JQ2-5027)
关键词 AlSn20/C复合镀层 硬度 结合力 摩擦系数 AlSn20/C composite coating hardness bonding force friction coefficient
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参考文献18

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