摘要
M5111-6/UM型五管软着陆扩散炉用于晶体硅太阳能电池片扩散工艺,具有全自动化、高产能、减压扩散等特点,介绍该型号设备结构组成及性能,并给出了工艺结果,结果表明该设备各方面性能均已达到国内领先水平。
M5111-6/UM five-tube soft landing diffusion furnace,which is used in the diffusion process of crystalline silicon solar cell,is a fully-automatic,high productivity and lower pressure diffusion.This paper introduces the major structure and performance of this equipment,and outlines process result,the result shows that all the performance of this equipment has reached advanced level in China.
出处
《电子工业专用设备》
2016年第8期30-34,共5页
Equipment for Electronic Products Manufacturing
关键词
太阳能电池
扩散工艺
减压扩散炉
Solar cell
Diffusion process
Low pressure diffusionfurnace
