摘要
采用微波等离子体化学气相沉积法,以H_2/CH_4/CO_2为混合气源,通过改变气源碳氧比,探讨了碳氧比对金刚石薄膜生长的影响。利用扫描电子显微镜(SEM)、X射线衍射(XRD)和Raman光谱表征金刚石薄膜的表面形貌、晶粒取向和结晶质量。结果表明,随着C/O比的降低,金刚石膜表面形貌由原来的(100)面为主转向(111)面为主的金字塔形,薄膜质量有所提高,内应力降低。
Diamond films were deposited with H2/CH4/CO2 gas mixtures as source using microwave plasma chemicalvapor deposition method with different carbon/oxygen ratio,which is aimed at exploring the effect of carbon oxygen ratioon the growth of diamond. The surface morphology,grain orientation and crystallinity of diamond films were systematicallycharacterized by scanning electron microscopy（SEM）,X-ray diffraction（XRD）and Raman spectroscopy. The resultsshow that with the decrease of C/O ratio,diamond films surface morphology changed from the original（100）plane to pyramid-shaped with（111）plane,film quality improved and internal stress is reduced.
出处
《真空与低温》
2016年第4期237-240,共4页
Vacuum and Cryogenics
基金
湖北省教育厅科学技术研究计划优秀中青年人才项目(Q20151517)
