基于CCR带并行腔双集束型设备调度方法

Scheduling method for double-cluster tools with parallel chambers based on capacity constraint resource

为有效解决450 mm晶圆制造中带有并行处理腔的集束型设备群调度问题,提出了基于产能约束资源(CCR)的调度方法。首先,综合考虑多品种加工、晶圆驻留和资源约束等特征,以系统总完工时间最小作为目标,建立带并行腔双集束型设备调度数学模型;其次,为优化机械手作业顺序,对CCR实施锁定-收紧-松弛(LTL)策略,构建了一种以CCR为界的分段调度算法;最后,进行了仿真实验分析。结果表明本文提出的算法是有效和有竞争性的。

To effectively solve scheduling problems of multiple cluster tools of 450 mm wafer fabrication systems with parallel processing chambers,a scheduling method based on capacity constraint resource（ CCR）was proposed. Firstly,with comprehensive consideration of the characteristics of different types of wafers,resources and residency constraints,a mathematical programming model of double-cluster tools with parallel chambers was established to minimize the makespan of the system. Then,to optimize manipulator movements by adopting locking-tightening-loosening（ LTL） strategy to the CCR,a piecewise scheduling algorithm was constructed with the CCR. Finally,through the analysis of simulation experiments,the results indicate that the proposed algorithm is valid and competitive.