接触触发式三维微纳米探头

A Touch Trigger 3D Probe for Micro/Nano Measurement

为解决微电子机械系统(MEMS)器件三维尺寸高精度测量的难题,研制了一种适用于微纳米三坐标测量机的新型高精度三维接触触发式探头。该探头只用了一个基于四象限感测器的二维角度传感器即可同时实现对测球三维运动的高精度感测。介绍了探头的结构和原理,建立了探头的灵敏度模型和刚度模型,用最优化方法得出了探头结构参数的最优解。对探头的刚度、感测范围、灵敏度、稳定性及触发重复性等性能指标进行了测试。实验结果表明:探头的刚度在三轴方向基本相同,约为1 m N/μm;允许触碰范围超过12μm;灵敏度大于0.5 m V/nm;在恒温环境(20±0.025)℃下,1.3 h内的位移漂移量约为20 nm;触发测量重复性小于40 nm(K=2)。该探头具有精度高、测力小、体积小、成本低、装调方便等优点,可被用于微纳米三坐标测量机。

To meet the requirement of high precision 3D measurement for MEMS devices, a new high precision touch trigger probe for micro-Nano/CMM is developed. Only one Quadrant Photo Diode （QPD） based two-dimensional angle sensor was used in this probe, which can detect the ball tip’s 3D motions of the probe precisely at the same time. The probe was introduced and analyzed. The sensitivity and stiffness models of the probe were achieved, and the optimal structural parameters of the probe were obtained. Several experiments have been conducted to test the stiffness, measurement range, sensitivity and repeatability of the probe. The experimental results demonstrate that the probe has 1 mN/μm uniform stiffness in 3D, the permitted measurement range is more than 12μm and the sensitivity is about 0.5 mV/nm in 3D. The drift is about 20 nm in 1.3 hours when the environment temperature is controlled to （20±0.025）℃, and the repeatability is less than 40 nm （K=2）. The probe has the advantages of high precision, low stiffness, small size, low cost and good assembly which can be applied to Micro/Nano CMM.