基于H卧板面内四足驱动的平面超声电机

Research on an Ultrasonic Planar Motor Driven by four In-Plane Ends of an H-shaped Stator

提出H结构定子三相振动模态驱动的平面超声电机,设定H卧板两纵杆端部处于xOy面内的四个凸起作为定子驱动足。通过H结构的面外二弯模态分别与面内一纵模态以及面内二弯模态的振动复合,在驱动足合成出沿yOz面、xOz面的椭圆轨迹,推动动子交替地沿x、y向做直线运动。阐释了电机的工作原理,推导出驱动足的两相空间椭圆轨迹方程;建立了定子有限元分析模型,实现了定子频率一致性动力学特性优化,仿真出驱动足的频响特性、振动响应及其运动调节特性,设计了电机的装配结构。模拟了仿真定子的运动,结果表明,驱动足沿x、y、z向振幅均达微米级,且调节激励电压和相位可调节电机x、y向速度与推力。该电机具有广阔应用前景。

An ultrasonic planar motor driven by the three-phase vibration modal based on H-shaped stator was proposed in this paper. Suppose the four bulges located in the xOy plane at the ends of two longitudinal rods of H- shaped horizontal plate are used as the driving feet of the stator, the Ist longitudinal mode, 2no in-plane bending mode and 2nd out-plane bending modes of H-shaped stator were used as working modes, which were employed to make the motor drive ends run in ellipse trajectories along the yOz and xOz planes to push the slider to do linear motion alter- nately along x and y directions. The principle of the motor was introduced, and the motion equation for drive end was derived. A frequency consistency optimization finite element analysis（FEA） model for the H-shaped stator was built to calculate the frequency response characteristics, driver particle vibration response and the movement regula- tion characteristics. An assemble structure was designed for the motor. The vibration simulations for the stator were carried out, which showed that the drive ends~ amplitude were up to micron level along the x, y, z directions and the motor＇s speed at x, y directions as well as the output powier could be regulated by moderating either the driving voltage or the phase angle. The proposed motor has wide application prospects.