摘要
为了获取高线性度微机械陀螺仪常温下的长时漂移特性,该文采用光测法(计算机视觉测试系统)与传统电测法相结合的方法,分别在t=0,25min,120min时测试了微机械陀螺驱动模态的振动特性。最后通过对比分析光测法和电测法的测试结果,获得了微机械陀螺仪的长时漂移特性,并给出了陀螺在常温下产生长时漂移的影响因素。
In order to obtain the long-time drift characteristics of the designed high-linearity MEMS gyroscope under normal temperature, the combination of vision identification method（computer micro vision system） and tradi- tional electrical method is used to test the vibration characteristics of MEMS gyroscope under driving mode at t=0, 25 min,120 min respectively. The long-time drift characteristics of MEMS gyroscope and the influence factors pro- duced the long-time drift are obtained by comparing the test results of the vision identification method and the tradi- tional electrical method.
出处
《压电与声光》
CAS
CSCD
北大核心
2016年第4期620-624,共5页
Piezoelectrics & Acoustooptics
基金
总装基金预研资助项目
关键词
微机械陀螺
长时漂移
视觉测量
动态测试
幅频特性
MEMS gyroscope
long-time drift
vision identification
dynamic test
amplitude-frequency charac-teristics
