无氟化学溶液法制备YBa2Cu3Oz超导薄膜

YBa_2Cu_3O_z superconducting films by non-fluorine chemical solution deposition approach

采用自主开发的无氟化学溶液沉积法在(00l)LaAlO_3单晶片上制备了YBa_2Cu_3O_z(YBCO)超导薄膜。研究了高温热处理过程中不同成相气氛和渗氧温度对YBCO薄膜结构和性能的影响。采用X射线衍射仪对薄膜进行了织构分析,通过扫描电镜和原子力显微镜观察了薄膜的表面形貌。采用磁性能测试系统测量了薄膜的超导转变温度和磁化曲线。实验结果表明,在干燥的热处理气氛和400℃渗氧制备的YBCO薄膜具有更加优异的性能。

YBa2Cu3Oz（YBCO）superconducting films were deposited on（00l）LaAlO3 single crystal substrate by self-developed fluorine-free chemical solution deposition approach.The effect of treating gas during high temperature heat treatment process and oxygen treatment temperature on structure and performance of YBCO films has been investigated.The texture was analysed by x-ray diffraction and the surface microstructure was observed by SEM and AFM.Superconducting transition temperature and magnetization curves were obtained by PPMS system.The results show that YBCO film treating in dry gas and oxygenated at 400 ℃ has more excellent performance.