带并行腔和重入约束的双臂集束型设备调度方法

Scheduling method for dual-blade cluster tools with parallel chambers and reentrancy constraints

为有效解决半导体制造业中带并行腔和重入约束的双臂集束型设备调度问题,提出一种以优化搜索为核心的调度方法.首先,引入优化FIFO(first in first out)搜索规则,并以系统总完工时间最小化作为目标,建立带并行腔和重入约束的四加工腔双臂集束型设备调度数学模型.在此基础之上,结合虚拟缓冲模块的概念,提出一种基于机械臂交换策略的优化搜索算法.最后,对所提出的算法进行仿真实验,实验结果表明该算法是可行且有效的.

To effectively solve the scheduling problems of dual-blade cluster tools with parallel processing chambers and reentran- cy constraints in semiconductor manufacturing, this article introduces a scheduling method centering on optimal searching. Firstly, according to the optimization search rule （FIFO）, a mathematical programming model of 4-chamber dual-blade cluster tools with paral- lel processing chambers and reentrancy constraints was built to minimize the makespan of the system. Combined with the concept of virtual buffer module, an optimum searching algorithm was proposed based on the robot swap strategy. Finally, simulation experiments were conducted for the proposed algorithm, and the results indicate that the algorithm is feasible and effective.