ZnO纳米薄膜及其声表面波传感器的制备与特性研究

Study on preparations and characterizations of ZnO nano-structural films and related SAW sensors

结合RF磁控溅射和水热合成法制备ZnO纳米结构薄膜,利用XRD及SEM分析ZnO薄膜的晶体结构和形貌、XPS分析薄膜的化学组分。结果表明,在适当的条件下,所制备的ZnO薄膜为具有良好c轴取向的纳米棒状结构,且ZnO纳米棒薄膜表面吸附的氧原子及晶格的氧空位缺陷增多。利用所制备ZnO纳米棒薄膜的上述特性,将其作为气体敏感材料。分别沉积于128°YX-LiNbO_3和36°YX-LiTaO_3基片,研制多层结构的声表面波(Rayleigh波和Love波)氢气传感器,并进行室温条件下氢气的实时传感检测,结果显示所研制的Love波传感器具有更高的灵敏度,性能更优化。

ZnO nano-structural films are prepared by RF magnetron sputtering and hydrothermal synthesis. The crystal structures, morphologies and chemical compositions of the ZnO nano-scaled films are analyzed by XRD, SEM and XPS. The results show that the ZnO nanorods are well oriented along c-axis as the preparing conditions are suitably selected. Meanwhile, there are a lot of oxygen vacancies and adsorbed oxygen atoms in the ZnO nano-structural films, which are beneficial to be utilized as gas-sensing materials. Furthermore, SAW （Rayleigh wave and Love wave） sensors based on ZnO nanorod films deposited on 128° YX-LiNbOa and 36° YX-LiTaO3 piezoelectric substrates are fabricated and used for hydrogen sensing at room temperature. The results indicate that the Love wave sensors have superior sensing properties, such as high sensitivities.