摘要
讨论了在电脑硬盘垂直记录磁头写头电镀FeCoNi合金时电镀基层、晶片设计、电镀挂架、电镀速率、电流密度以及电镀液pH和温度等因素对镀层厚度及成分均匀性的影响。
The effects of seed layer, wafer design, plating rack, plating rate, current density as well as pH and temperature of plating bath on thickness and composition uniformity of electroplated FeCoNi coating on the writer of perpendicular magnetic recording (PMR) head in hard disk driver (HDD) were discussed.
出处
《电镀与涂饰》
CAS
CSCD
北大核心
2016年第15期803-807,共5页
Electroplating & Finishing
关键词
垂直记录磁头
写头
铁钴镍合金
电镀
均匀性
影响因素
perpendicular magnetic recording head
writer
iron-cobalt-nickel alloy
electroplating
uniformity
influential factor