超高分辨、高灵敏光学检测方法与技术

Ultrahigh-resolution and high-sensitive optical detection methods and technologies

超高分辨、高灵敏光学检测方法与技术不仅是获取物质微观信息的重要手段,同时也是高精度光学加工、高精密3D打印等先进制造技术的基础.本文简要介绍和分析了超高分辨和高灵敏光学成像技术、亚纳米级精度光学表面检测技术、三维空间信息精确提取与精密检测技术,以及高灵敏度精细光谱实时检测技术等方向的发展历史、现状以及发展趋势,结合我国的战略需求,对"十三五"期间应重点开展的超高分辨、高灵敏光学检测方法与技术提出了建议和展望.

Ultrahigh-resolution and high-sensitive optical detection methods and technologies not only allow us to obtain information about the microscopic composition of materials, but also provide a foundation for highprecision optical fabrication and high-precision 3D printing. This paper presents a brief introduction and analysis of the history, current status, and future trends for several important optical detection methods and technologies, including ultrahigh-resolution and high-sensitive optical imaging technology, optical surface detection with sub-nanometer precision, precise 3D spatial information extraction and precision measurement technology, and ultra-sensitive high-precision optical spectroscopy. After considering China＇s future strategic needs, we give advice and our perspectives on several ultrahigh-resolution and high-sensitive optical detection methods and technologies to which particular intense attention should be directed during China＇s 13 th Five-Year Plan period.