基于RSM的单晶Si高速线锯切割力试验研究

Experimental Research on Monocrystalline Si High-speed Wire Sawing Force Based on RSM

采用Box-Behnken Design(BBD)设计实验,研究高速线锯切割过程中线锯速度、进给速度和工件转速三个工艺参数对单晶Si切割力的影响,通过曲面响应法(Response surface methodology,RSM)建立单晶Si片切割力的响应模型,并进行方差分析,获得了高速线锯切割单晶Si过程中不同工艺参数对切割力的影响规律和切割力最小时的工艺参数。试验结果表明该模型能实现单晶Si切割过程的切割力预测。

The Box-Behnken-Design was applied to design the experimental scheme, and then the factors which affect cutting force, such as the wire saw velocity, the feed rate and the part rotating speed, during high speed wire saw cutting monocrystalline Si process were inversigated. Response Surface Methodology （RSM） was used to optimize the processing parameters and establish the cutting force model of monocrystalline Si. Analysis of variance is also carried out to verify the feasibility of the cutting force model, and the processing optimum parameters are obtained when the cutting force is minimum. The verification experimental results show that the model can predict the cutting force effectively for machining monocrystalline Si.