提高氦质谱检漏仪检漏压力的研究

Study on Improvement of Helium Leak Detector Pressure

从讨论逆扩散型氦质谱检漏仪检漏压力出发,提出一种可以提高检漏压力的方法,并通过实验分析这种高压下的检漏范围、仪器本底、信号响应与清除时间,以及这种高压下检漏需要注意的问题。

This paper based on the testing pressure of reverse diffusion type helium mass spectrometer leak detector,we proposed a new method to enhance the testing pressure. Additionally, experimental researchgave different responses for detection range,background signal, signal response and clearing time under high-pressure environment. By the way, some matters needing attention when using helium mass spectrometer leakage detecting under high-pressure have also been discussed in the paper.