光学非球面面形非零位检测的回程误差校正

Retrace Error Correction for Non-Null Testing of Optical Aspheric Surface

光学非球面面形的非零位检测较零位检测而言具有更强的通用性。详细分析了非球面非零位检测中回程误差的产生机理,结合校正方法将其分为可预知回程误差和不可预知回程误差两部分,分析其对最终检测结果的影响。然后介绍了实际检测中常用的回程误差校正方法的原理,通过仿真实验对比各种方法对不同非球面度、不同面形误差大小的被测非球面的校正效果,并结合方法原理和仿真结果分析了不同方法的回程误差校正能力,总结其适用范围。

Non-null testing methods of optical aspheric surface are more common than the null testing ones.The mechanism of the production of retrace error in aspheric non-null testing are analyzed in detail.The retrace error is divided into predictable part and unpredictable part by combing calibration method and its influence on final testing result is analyzed.The principle of common retrace error calibration method in actual testing is introduced.The correction effects of each method on aspheric surface under test with different asphericities and different surface errors are compared by simulation experiment.The correction ability of retrace error of each method is analyzed by combing the method principle and simulation result,and the application range is summarized.