多晶硅生产SiHCl_3精馏工艺改造

Reformation of the distillation process of SiHCl_3 for polycrystalline production

针对多晶硅生产中SiHCl_3精馏工艺存在的问题,对其进行改造。改造后,工艺流程简化,设备配套使用量大幅度减少;生产系统的安全性和稳定性有所改善,月均产量增加约11.1%;副产物SiH_2Cl_2得到有效利用,尾气的排放量得到控制,月均减少NaOH和CaO使用量约0.8t;精馏塔塔顶、塔釜可分别节能约25%、28.7%;精制SiHCl_3产品和多晶硅产品的总合格率分别提高5.3%和5.9%。

To solve the problem existing in the distillation process of SiHCl_3 for polysilicon production,the original process is reformed. Compared with the original process,the new process flow is simplified and the quantity of accompanying equipment is greatly reduced. The safety and stability of the system are improved and the monthly average yield is increased by 11. 1%. The effective utilization of SiH_2Cl_2 byproduct and good controll of the tail gas emission are also achieved. The monthly average use of Na OH and Ca O is reduced by 0. 8 t. The refrigeration duty of condenser of distillation tower is saved by 25%,and heat duty of reboiler is saved by 28. 7%. Furthermore,the qualified rates of refined SiHCl_3 and polysilicon products are increased by 5. 3% and 5. 9%,respectively.