气体总流量对多弧离子镀TiN涂层表面形貌和力学性能的影响

Influence of Total Gas Flow on Surface Morphology and Mechanical Properties of TiN Coatings Deposited by Multi-arc Ion Plating

采用多弧离子镀膜技术在硬质合金基体表面沉积TiN涂层,研究了气体总流量对TiN涂层表面形貌和力学性能的影响。通过SEM观察涂层表面形貌,利用ImageJ图像处理软件对涂层的像素分布进行统计和分析,并通过自动划痕仪和纳米压痕仪对涂层的力学性能进行表征。结果表明,随着气体总流量的增加,涂层表面大颗粒的数量和尺寸均在增加,涂层附着力先增大后减小,而显微硬度先减小后增大;当气体总流量为300mL/min时,涂层气坑数量最多,附着力最大,为106.4N;当气体总流量为100mL/min时,涂层显微硬度最大,为HV3 021。

TiN coatings were deposited on the surface of cemented carbide substrate by multi-arc ion plating. The effect was studied of total gas flow on the surface morphology and mechanical properties of TiN coatings. The surface morphology of the coatings was observed by SEM. The pixel distribution of the coat- ings was analyzed by ImageJ software. And the mechanical properties of TiN coatings were evaluated by automatic scratch spectrometer and nanoindenter. The results show that with total gas flow increasing, both the amount and size of microparticles on coating surface increase, the adhesion force of the coatings in- creases firstly and then decreases, but its micro-hardness decreases firstly and then increases. When the total gas flow is 300 mL/min,the coatings have the most gas pits and the highest adhesion force of 106.4 N. When the total gas flow is 100 mL/min,the coatings have the highest micro-hardness of HV3 021.