MEMS扫描镜光学性能的圆片级自动检测系统设计

Design of automatic detection system of wafer level optical performance of MEMS scanning mirror

为快速准确地检测出一张硅片上数百个MEMS扫描镜的良品与次品,设计了一种自动测量系统。选用高精度二维位置敏感探测器(PSD)设备,设计其后置硬件电路并编写数据采集的程序。结合经典三角法测量角度的原理搭建自动检测系统,在室温和正常光照条件下,完成了MEMS扫描镜光学性能圆片级自动检测的实验。结果表明:该系统能够快速准确地同时对扫描镜的两个轴进行检测并给出结果。

In order to detect good products and defective goods in hundreds of MEMS scanning mirrors on a silicon wafer fastly and accurately, an automatic test system is designed. A high precision 2D PSD equipment is chosen,rear hardware circuit of PSD is designed and its data collection program is compiled. Build up automatic detection system combined with angles measuring theory of classical triangulation method, experiment for optical performance detection of MEMS scanning mirrors are implemented at room temperature and under ambient light. Results indicate that this system can detect two axis of the scanning mirror and give out the result.